Product Series & Specifications

Main Forms:

Planar Targets: Rectangular, circular, and other plate-like structures, suitable for various flat panel coating applications.

Dimensions: The thickness, width and length can be customized according to customer requirements. The diameter of the round target can also be customized.

Rotary / Tubular Targets: Hollow cylindrical shapes, offering higher material utilization and more stable coating processes.

Dimensions: The outer diameter, length and wall thickness can be customized according to customer requirements.

Custom Shaped Targets: Unique target shapes can be provided according to customer drawings.

Material Grade:

High-Purity Commercially Pure (CP) Titanium: Gr1, Gr2, Gr3, Gr4 (Purity up to 99.95% - 99.999%), ensuring high film purity, low resistivity, and excellent optical properties.

Titanium Alloys: Gr5 (Ti-6Al-4V), Gr7, Gr9, Gr11, Gr12, Gr23, etc., suitable for applications requiring specific mechanical, corrosion-resistant, or biocompatible thin films.

Applicable Standards:

Raw Material Standards: ASTM B348 (Bars, as primary raw material), ASTM B381 (Forgings), ASTM B265 (Plate, Sheet, Strip).

Aerospace Material Specifications: AMS 4928 (Ti-6Al-4V Bars/Forgings, as raw material for high-demand targets).

Biomedical Material Standards: ASTM F136 (Ti-6Al-4V ELI) / ASTM F67 (CP Titanium), for raw materials of medical coating targets.

Internal Quality & Purity Control: We typically adhere to strict internal specifications and can produce and test according to industry-specific standards for semiconductors, displays, etc. (e.g., certain SEMI standards).

Manufacturing Process & Quality Control

High-Purity Melting: We primarily utilize world-leading Vacuum Arc Remelting (VAR) technology or advanced vacuum melting techniques like Electron Beam (EB) Melting and Plasma Arc Cold Hearth Melting (PAM) for multi-stage melting. This is performed in a high-vacuum environment, effectively removing impurities like hydrogen, oxygen, and nitrogen, thereby ensuring high target purity, density, and compositional uniformity, providing optimal raw material for target production.

Process Advantages: Ensures compositional homogeneity, minimizes segregation, controls microstructure, and provides stable, high-quality raw materials for downstream processing.

Precision Plastic Forming & Shaping: Ingots are processed through multi-directional forging, hot rolling, and cold rolling to form the slabs, rounds, or tubes required for targets. These processes optimize the material's grain structure and further enhance density and uniformity.

High-Precision Machining: Utilizing CNC (Computer Numerical Control) equipment for precision machining, ensuring strict dimensional tolerances, excellent flatness/roundness, and precise edge finishing of the targets. For rotary targets, straightness and concentricity are ensured.

Rigorous Quality Testing (INSPECTIONS):

Raw Material Inspection: Strict chemical composition analysis (ICP-OES, GDMS, RGA, etc.) and purity testing of raw materials.

Internal Flaw Detection: 100% Ultrasonic Testing (UT) is performed on finished titanium targets, comprehensively detecting internal inclusions, porosity, cracks, and other defects, ensuring internal quality meets the most stringent requirements of semiconductor, optical, and other fields.

Geometric Dimensions & Surface Quality Inspection: Precise measurement of dimensions, flatness/roundness, straightness, and high-precision visual and automated inspection for surface roughness and defects (e.g., scratches, stains).

Microstructure Analysis: Metallographic analysis to evaluate grain size and structural uniformity.

Density Measurement: Ensuring target density meets specifications.

Traceability: Comprehensive material reports are provided, ensuring complete traceability from raw material to final target, with support for independent third-party certification.

Target Bonding Service : We can provide professional target bonding services, securely welding or bonding the target material to a backing plate (e.g., copper backing plate) to ensure optimal thermal conductivity and sputtering efficiency, thereby extending target lifespan.

Why Choose Our Titanium Targets?

Extensive Experience: Focused on the R&D and manufacturing of high-purity titanium targets for over 19 years, accumulating vast technical expertise and rigorous quality control experience in areas such as high-purity metal refining, vacuum melting, precision machining, and thin film application matching.

Superior Melting Technology: We primarily utilize world-leading Vacuum Arc Remelting (VAR) technology, along with advanced processes like Electron Beam (EB) Melting or Plasma Arc Cold Hearth Melting (PAM). These techniques effectively remove impurities, ensuring high ingot purity, density, and compositional uniformity, providing optimal raw material for target production.

Quality Assurance: All products are accompanied by comprehensive test reports, and independent third-party certifications (e.g., TUV, SGS, BV, Lloyd's Register) are readily available upon request, to ensure product quality strictly conforms to relevant standards and is committed to exceeding customer expectations.

ISO 9001:2015 Certified Facility: Strictly adhering to international quality management systems, we rigorously follow high standards and pursue continuous improvement at every step from raw material procurement to final target delivery.

Customized Services: Whether for standard dimensions and shapes or custom titanium targets based on specific customer requirements (e.g., unique alloy compositions, custom sizes, high-precision demands, target bonding services), we are committed to providing exclusive solutions.

Flexible Procurement & Stock: No strict minimum order quantity (MOQ) limit, respecting every user's purchasing requirements; common raw materials or finished targets are kept in stock to expedite supply.

Test Samples Available: Free test samples can be provided for select products. According to company policy, customers are responsible for sample shipping costs.